Laser processing of thin films and microstructures :
Boyd, Ian W.,
Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators / Ian W. Boyd. - Berlin ; Springer-Verlag, c1987. - viii, 320 p. : 77 ill. ; 24 cm. - Springer series in materials science ; 3 . - Springer series in materials science ; v. 3. .
0387179518
Lasers--Industrial applications
621.36/6 / BOY
Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators / Ian W. Boyd. - Berlin ; Springer-Verlag, c1987. - viii, 320 p. : 77 ill. ; 24 cm. - Springer series in materials science ; 3 . - Springer series in materials science ; v. 3. .
0387179518
Lasers--Industrial applications
621.36/6 / BOY