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Thin film technology /

Berry, Robert W.

Thin film technology / by Robert W. Berry, Peter M. Hall, Murray T. Harris. - Huntington, N.Y. : R. E. Krieger Pub. Co., 1979, c1968. - xxi, 706 p. : ill. ; 24 cm.

ISBN: 088275744X

Subjects--Index Terms: Thin films. Thin film circuits. Integrated circuits.

Dewey Class. No.: 621.381/73 / BER

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