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VLSI micro- and nanophotonics : science, technology, and applications /

VLSI micro- and nanophotonics : science, technology, and applications / editors, El-Hang Lee ... [et al.]. - Boca Raton, FL : CRC Press, 2010. - 1 v. : ill. ; 26 cm.

ISBN: 9781574447293

Subjects--Index Terms: Microelectromechanical systems--Technological innovations. Nanophotonics--Technological innovations. Integrated circuits--Very large scale integration

Dewey Class. No.: 621.39/5 / VLS

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