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Advanced Micro & Nanosystems

Advanced Micro & Nanosystems CMOS-MEMS - Editors O Brand & G K Fedder - Germany WILEY-VCH - 594p. - Volume 2 .

ISBN: 9783527310807

Subjects--Index Terms: Fabrication Technology, Monolithically Integrated Inertial Sensors, RF CMOS MEMS, Biometric Capacitive CMOS Fingerprint Sensor Systems

Dewey Class. No.: 621.3815

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