Fundamentals of Microfabrication
Madou, Marc
Fundamentals of Microfabrication - Boca Raton CRC Press - 589p.
9780849394515
Microfabrication Applications, Scaling Laws, Actuators, Micromachine Development, Packing, LIGA, Micromachining Techniques
621.38152
Fundamentals of Microfabrication - Boca Raton CRC Press - 589p.
9780849394515
Microfabrication Applications, Scaling Laws, Actuators, Micromachine Development, Packing, LIGA, Micromachining Techniques
621.38152