FOUNDATIONS OF MEMS
CHANG LIU
FOUNDATIONS OF MEMS - 2 - CHENNAI PEARSON 2018 - 576p.
9788131764756
INTRODUCTION TO MICROFABRICATION ESSENCIAL ELECTRICAL AND MECHANICAL CONCEPTS ELECTROSTATIC SENSING AND ACTUATION
621.3 / LIC/F
FOUNDATIONS OF MEMS - 2 - CHENNAI PEARSON 2018 - 576p.
9788131764756
INTRODUCTION TO MICROFABRICATION ESSENCIAL ELECTRICAL AND MECHANICAL CONCEPTS ELECTROSTATIC SENSING AND ACTUATION
621.3 / LIC/F