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Microelectronic materials and processes

Levy,R A

Microelectronic materials and processes - London Kluwer Acadmic Press 1986 - xiv,981p. - series E : Applied sciences 164 .

ISBN: 0792301471

Subjects--Index Terms: microelectronic materials microelectronic processes

Dewey Class. No.: 621.381 046 / LEV

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