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Microelectronic polymers

Htoo, Maung S.

Microelectronic polymers Maung S. Htoo. - New York M. Dekker 1989. - ix, 407 p. : ill. ; 24 cm.

ISBN: 0824779908

Subjects--Index Terms: Polymers Microlithography--Materials Microelectronics--Materials. Polymers-application Microelectronics-materials Polymers-application in microelectronics Lithographic polymers

Dewey Class. No.: 678.06:62 / HTO

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