Integrated chemical microsensor systems in CMOS technology
Hierlemann, Andreas
Integrated chemical microsensor systems in CMOS technology - New York Springer 2005 - x, 229p.
Microtechnology and MEMS
3-540-23782-8
Microsenor systems - Chemical Chemical microsensor system CMOS Metal oxide semiconductor Microelectromechanical systems
621.3.049.77
Integrated chemical microsensor systems in CMOS technology - New York Springer 2005 - x, 229p.
Microtechnology and MEMS
3-540-23782-8
Microsenor systems - Chemical Chemical microsensor system CMOS Metal oxide semiconductor Microelectromechanical systems
621.3.049.77