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Micromachines as tools for nanotechnology

Fujita, H.

Micromachines as tools for nanotechnology - New Delhi Springer 2004 - xii, 212p.

ISBN: 81-8128-202-7

Subjects--Index Terms: Microtechnology MEMS Nanotechnology

Universal Decimal Class. No.: 608.001.76 / FUJ

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