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Micromechanics & MENS; classic & Seminal Papers to 1990

Trimmer,William

Micromechanics & MENS; classic & Seminal Papers to 1990 - - New York Institute of Electrical & Electronics Engineers 1997 - xv,701p

"A Selected Reprint volume"

ISBN: 0-7803-1085-3

ISSN:

Subjects--Index Terms: Microelectronics Electronics Semiconductors Electromechanical devices MICROMECHANICAL DEVICES Actuators

Dewey Class. No.: 621.3.049.77

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