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MEMS and microsystems

Hsu, Tai-Ran

MEMS and microsystems Design and manufacture - New Delhi Tata Mc Graw Hill 2002 - 436p.

ISBN: 0-07-239391-2

Subjects--Topical Terms:
621.38.049.77--Microelectronics--Microsystems design, packaging

Universal Decimal Class. No.: 621.38.049.77 / HSU

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