MEMS:
Gad-el-Hak, Muhamed [ed.]
MEMS: introduction and fundamentals - 2nd ed. - Boca Raton CRC Taylor & Francis 2006 - various pagination 3v. - (Mechanical Engineering) .
V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
0-8493-9137-7
Microelectronics Nanotechnology Microelectromechanical systmes MEMs-fundamentals
621(035) / GAD.1
MEMS: introduction and fundamentals - 2nd ed. - Boca Raton CRC Taylor & Francis 2006 - various pagination 3v. - (Mechanical Engineering) .
V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
0-8493-9137-7
Microelectronics Nanotechnology Microelectromechanical systmes MEMs-fundamentals
621(035) / GAD.1