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Process technology for silicon carbide devices

Zetterling, Carl-Mikael

Process technology for silicon carbide devices - - London INSPEC/IEE 2003 - xxii, 176p.

ISBN: 0-85296-998-8

ISSN:

Subjects--Index Terms: Silicon carbide - Electric properties

Dewey Class. No.: 621.3:661.665.1

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