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Electroceramic based MEMS fabricatic technology and application

Setter, Nava

Electroceramic based MEMS fabricatic technology and application - - New York Springer 2005 - xii, 414p.

ISBN: 0-387-23310-5

ISSN:

Subjects--Index Terms: Microelectro mechanical systems Electro ceramics Microactuators Piezoelectric films Pyroelectric thin films MEMS

Dewey Class. No.: 621.38

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