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MEMS and microsystems: design and manufacture

Hsu, Tai-Ran

MEMS and microsystems: design and manufacture - - New Delhi Tata McGraw- Hill 2005 - xii,436p.

ISBN: 0-07-048709-x

ISSN:

Subjects--Index Terms: Microelectronics Electronics Semiconductors Microelectromechanical systems MEMS Microelectronic packaging

Dewey Class. No.: 621.38

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