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Modeling MEMS and NEMS

Pelesko, John A.

Modeling MEMS and NEMS - - Boca Raton Chapman & Hall /CRC 2007 - xxiii, 357p

ISBN: 1584883065

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Subjects--Index Terms: MEMS- Mathematical models NEMS- Mathematical models Microelectromechanical systems Nanoelectromechanical systems

Dewey Class. No.: 681.382

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