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Advances in multiphysics simulation and experimental testing of Mems

Frangi, Attilio

Advances in multiphysics simulation and experimental testing of Mems - - London Imperial College Press 2008 - xii, 489p

ISBN: 9781860948626

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Subjects--Index Terms: Microelectromechanical systems - simulations methods Microelectromechanical systems - Testing MEMS

Dewey Class. No.: 621.382

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