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Handbook of silicon wafer cleaning technology

Reinhardt, Karen. A.

Handbook of silicon wafer cleaning technology - 2nd - Norwich William Andrew 2008 - xxvi, 718p

ISBN: 9780815515548

ISSN:

Subjects--Index Terms: Silcon-on-insulator technology Silicon wafer Dry cleaning Wet chemical processes Plasma stripping

Dewey Class. No.: 621.315.617

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