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Plasma-Aided nanofabrication:from plasma sources to nanoassembly

Ostrikov, Kostya(Ken)

Plasma-Aided nanofabrication:from plasma sources to nanoassembly - - Weinhein Wiley - VCH 2007. - xiii,300p.

ISBN: 9783527406333

ISSN:

Subjects--Index Terms: Nanostructured materials Plasma engineering Low temparature plasmas Manufactureing processes

Dewey Class. No.: 620.1.03

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