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Scaling issues and design of MEMS

Baglio, Salvatore

Scaling issues and design of MEMS - - Chichester John Wiley and Sons 2007 - xiii,229p.

ISBN: 9780470016992

ISSN:

Subjects--Index Terms: Microelectromechanical systems - design and construction MEMS

Dewey Class. No.: 621.382

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