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Vacuum Technology , Thin Films , and Sputtering , an Introduction

Stuart , R. V

Vacuum Technology , Thin Films , and Sputtering , an Introduction - - New York Academic Press 1983 - viii, 151 p.

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Subjects--Index Terms: Thin films ,Vacuum Technology Sputterng , Thin Films-Vacuum Technology

Dewey Class. No.: 621.52

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