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Principles of microelectromechanical systems

Lee, Ki Bang

Principles of microelectromechanical systems - New Jersey John Wiley 2011 - xii, 667p.

ISBN: 9780470466346

Subjects--Index Terms: Microelectromechanical systems Electrostatic actuators Electromagnetic actuators

Universal Decimal Class. No.: 621.38:621.319 / LEE

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