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Micro and smart devices and systems

Vinoy, K.J....[et.al.]

Micro and smart devices and systems by K.J. Vinoy......[et.al.] - New Delhi Springer 2014 - xxvi, 508p. - Springer tracts in mechanical engineering .

ISBN: 9788132219125

Subjects--Index Terms: Microsensors Microactuators Microelectronics MEMS

Universal Decimal Class. No.: 621.382 / VIN

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