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Glow discharge processes: sputtering and plasema etching

Chapman, Brain

Glow discharge processes: sputtering and plasema etching - - New York John Wiley 1980 - xv, 406 p.

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Subjects--Index Terms: Electricity Physics Optics Biophysics Astrophysics Nuclear physics Radioactivity Quantum theory Mechanics Hydrostatics Thermodynamics Science Chemistry Electronics Amplifiers- electronics Cybernetics digital electronics Electric conductors Electronic circuits Semiconductors Superconductors Transistors Microelectronics Semiconductor Engineering Technology electricity and electronics

Dewey Class. No.: 537.525

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