Laser Chemical Processing for Microelectronics (Record no. 246017)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00405nam a22001577a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0521322545 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| Item number | IBB |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Ibbs, K.G. |
| 245 ## - TITLE STATEMENT | |
| Title | Laser Chemical Processing for Microelectronics |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | Cambridge |
| Name of publisher, distributor, etc. | Cambridge University Press |
| Date of publication, distribution, etc. | 1989 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 192 p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microelectronics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Laser Chemical Processing |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Osgood, R.M. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
No items available.