Defects control in semiconductors: Proceedings of the conference on the science and technology of defect control in semiconductors,...

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Material type: TextTextPublication details: Amsterdam North-Holland Publishing Company 1990Edition: Description: v.2ISBN:
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Subject(s): DDC classification:
  • 621.382:620.1
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Conference: Internatioal conference on the science and technology of defect control in semiconductors(1989 Sept. 17-22: Yokohama)

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