Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.

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TextPublication details: New York : Academic Press, 1983.Description: viii, 151 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	Department of Physics	621.5/5 STU (Browse shelf(Opens below))	Available		PHY007339

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Previous	621.55 GRE The design and construction of small vacuum systems,	621.5/5 GUT Vacuum technology /	621.5/5 ROB The physical principles of ultra-high vacuum systems and equipment,	621.5/5 STU Vacuum technology, thin films, and sputtering :	621.5/5 STU Vacuum technology, thin films, and sputtering :	621.55 TUR An introduction to vacuum technique	621.55 YAR High vacuum technique: theory, practice and properties of materials,	Next

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