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Ion implantation : basics to device fabrication / by Emanuele Rimini.

By: Material type: TextTextSeries: Kluwer international series in engineering and computer science ; SECS 293. | Kluwer international series in engineering and computer science. Electronic materials, science and technology.Publication details: Boston : Kluwer Academic Publishers, c1995.Description: xii, 393 p. : ill. ; 25 cmISBN:
  • 0792395204
Subject(s): DDC classification:
  • 621.3815/2 RIM
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Item type Current library Call number Status Date due Barcode
Books Books Department of Physics 621.3815/2 RIM (Browse shelf(Opens below)) Available PHY012836

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Cochin University of Science and Technology
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