Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos.

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Material type: Text

TextSeries: Microsystems (Series) ; v. 15.Publication details: New Delhi: Springer, c2005.Description: xv, 254 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	Department of Physics	537.5 SAN (Browse shelf(Opens below))	Available		PHY013403

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