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Laser microfabrication : thin film processes and lithography

By: Contributor(s): Material type: TextTextPublication details: Sandiego, Academic Press, 1989Edition: Description: xii,587 p., , BookISBN:
  • 0-12-233430-2
ISSN:
Subject(s): DDC classification:
  • 535.374
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University Library
Cochin University of Science and Technology
Kochi-682 022, Kerala, India