Veronis, Andrew <br/><br/>
Integrated circuit fabrication technology 

 - 
 - Virginia  Reston  1979 
 - x, 193p.   
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<br/><br/><label>ISBN: </label>
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Integrated circuits  Integrated circuit technology 
<br/><br/><label>Dewey Class. No.: </label>621.3.049.77