TY  - BOOK
AU  - Poate, J M
AU  - Tu, K N
TI  - Thin films - interdiffusion and reactions
U1  - 621.3.049.772.2 
PY  - 1978///
CY  - New York
PB  - Wiley Eastern
KW  - Microelectronics
KW  - Electronics
KW  - Semiconductors
KW  - Thin films
ER  -