Stuart, R. V. <br/><br/>
Vacuum technology, thin films, and sputtering :  an introduction / 
R.V. Stuart. 
 - New York :  Academic Press,  1983. 
 - viii, 151 p. :  ill. ;  24 cm. 
<br/><br/><label>ISBN: </label>0126747806 
<br/><br/><label>Subjects--Index Terms: </label>Vacuum technology  Thin films  Cathode sputtering (Plating process) 
<br/><br/><label>Dewey Class. No.: </label>621.5/5  / STU