TY  - BOOK
AU  - Klabunde,Kenneth J.,ed
TI  - Thin films from free atoms and particles
SN  - 0124107559
U1  - 530.4/1 
PY  - 1985///
CY  - Orlando
PB  - Academic Press
KW  - Thin films
KW  - Layer structure (Solids)
KW  - Crystal growth
KW  - Atoms
KW  - Particles
ER  -