Boyd, Ian W., <br/><br/>
Laser processing of thin films and microstructures :  oxidation, deposition, and etching of insulators / 
Ian W. Boyd. 
 - Berlin ;  Springer-Verlag,  c1987. 
 - viii, 320 p. :  77 ill. ;  24 cm. 
 - Springer series in materials science ;  3 .
 - Springer series in materials science ;  v. 3. .
<br/><br/><label>ISBN: </label>0387179518  
<br/><br/><label>Subjects--Index Terms: </label>Lasers--Industrial applications 
<br/><br/><label>Dewey Class. No.: </label>621.36/6  / BOY