TY  - BOOK
AU  - Boyd,Ian W.
TI  - Laser processing of thin films and microstructures: oxidation, deposition, and etching of insulators 
T2  - Springer series in materials science
SN  - 0387179518 
U1  - 621.36/6 
PY  - 1987///
CY  - Berlin
PB  - Springer-Verlag
KW  - Lasers--Industrial applications
ER  -