Milek, John T. <br/><br/>
Silicon nitride for microelectronic applications,  6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices. 
[by] John T. Milek. 
 - New York,  IFI/Plenum,  1971-72. 
 - 6 v.  illus.  28 cm. 
 - Handbook of electronic materials, v. 3, 6 .
 - Handbook of electronic materials ;  v. 3, etc. .
<br/><br/><label>ISBN: </label>0306671034 
<br/><br/><label>Subjects--Index Terms: </label>Microelectronics--Materials.  Silicon nitride 
<br/><br/><label>Dewey Class. No.: </label>621.381/7  / MIL