TY  - BOOK
AU  - Milek,John T.
TI  - Silicon nitride for microelectronic applications,: 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices
T2  - Handbook of electronic materials, v. 3, 6
SN  - 0306671034
U1  - 621.381/7 
PY  - 1971///-72
CY  - New York
PB  - IFI/Plenum
KW  - Microelectronics--Materials
KW  - Silicon nitride
ER  -