Semiconductor technology :  processing and novel fabrication techniques / 
edited by Mikhail Levinshtein, Michael S. Shur. 
 - New York :  Wiley,  c1997. 
 - xviii, 240 p. :  ill. ;  24 cm. 
<br/><br/><label>ISBN: </label>0471127922  
<br/><br/><label>Subjects--Index Terms: </label>Semiconductors  Semiconductor doping  Semiconductors--Defects 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2  / LEV