TY  - BOOK
AU  - Levinshteĭn,M.E.,ed
AU  - Shur,Michael,ed
TI  - Semiconductor technology: processing and novel fabrication techniques 
SN  - 0471127922 
U1  - 621.3815/2 
PY  - 1997///
CY  - New York
PB  - Wiley
KW  - Semiconductors
KW  - Semiconductor doping
KW  - Semiconductors--Defects
ER  -