TY  - BOOK
AU  - Kahng,Dawon,ed
TI  - Silicon integrated circuits
T2  - Applied solid state science: advances in materials and device research
SN  - 0120029545 
U1  - 621.381/71 
PY  - 1981///-1985
CY  - New York
PB  - Academic Press
KW  - Metal oxide semiconductors
KW  - Semiconductor storage devices
KW  - Integrated circuits
ER  -