Berry, Robert W. <br/><br/>
Thin film technology / 
by Robert W. Berry, Peter M. Hall, Murray T. Harris. 
 - Huntington, N.Y. :  R. E. Krieger Pub. Co.,  1979, c1968. 
 - xxi, 706 p. :  ill. ;  24 cm. 
<br/><br/><label>ISBN: </label>088275744X 
<br/><br/><label>Subjects--Index Terms: </label>Thin films.  Thin film circuits.  Integrated circuits. 
<br/><br/><label>Dewey Class. No.: </label>621.381/73  / BER