TY  - BOOK
AU  - Berry,Robert W.
AU  - Hall,Peter M.
AU  - Harris,Murray T.
TI  - Thin film technology
SN  - 088275744X
U1  - 621.381/73 
PY  - 1979///, c1968
CY  - Huntington, N.Y.
PB  - R. E. Krieger Pub. Co.
KW  - Thin films
KW  - Thin film circuits
KW  - Integrated circuits
ER  -