TY  - BOOK
AU  - Santos,Hector J.de los
TI  - Principles and applications of NanoMEMS physics
T2  - Microsystems
SN  - 1402032382
U1  - 537.5 
PY  - 2005///
CY  - New Delhi
PB  - Springer
KW  - Quantum electronics
KW  - Wave-particle duality
KW  - Nanotechnology
KW  - Microelectromechanical systems
ER  -