MEMS and MOEMS technology and applications / 
P. Rai-Choudhury, editor. 
 - New Delhi :  PHY Learning,  c2009. 
 - xi, 520 p. :  ill. ;  27 cm. 
<br/><br/><label>ISBN: </label>0819437166 
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical systems.  Optoelectronic devices. 
<br/><br/><label>Dewey Class. No.: </label>621.381  / MEM