TY  - BOOK
AU  - Rai-Choudhury,P.,ed
TI  - MEMS and MOEMS technology and applications
SN  - 0819437166
U1  - 621.381 
PY  - 2009///
CY  - New Delhi
PB  - PHY Learning
KW  - Microelectromechanical systems
KW  - Optoelectronic devices
ER  -