VLSI micro- and nanophotonics : science, technology, and applications / 
editors, El-Hang Lee ... [et al.]. 
 - Boca Raton, FL :  CRC Press,  2010. 
 - 1 v. :  ill. ;  26 cm. 
<br/><br/><label>ISBN: </label>9781574447293  
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical systems--Technological innovations.  Nanophotonics--Technological innovations.  Integrated circuits--Very large scale integration 
<br/><br/><label>Dewey Class. No.: </label>621.39/5  / VLS