TY  - BOOK
AU  - Lee,El-Hang,ed
TI  - VLSI micro- and nanophotonics : science, technology, and applications
SN  - 9781574447293 
U1  - 621.39/5 
PY  - 2010///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems--Technological innovations
KW  - Nanophotonics--Technological innovations
KW  - Integrated circuits--Very large scale integration
ER  -