TY  - BOOK
AU  - Suntola, T.
AU  - Simpson, M.
TI  -  Atomic layer epitaxy
SN  - 0-412-02011-4
U1  - 541.183 
PY  - 1990///
CY  - New York
PB  - Chapman and hall
KW  - EpitaxySurface chemistryLayer structure solidsEpitaxy
N1  - International School of Photonics
ER  -